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BEVERLY, MASS. — Axcelis Technologies has sold its corporate headquarters facility located at 208 Cherry Hill Dr. in Beverly. An affiliate of Northbrook, Ill.-based Middleton Partners purchased the property for $49 million. Built in 1984 and situated on 37 acres, the facility consists of 417,313 square feet high-end office and industrial space. Axcelis is will lease the property on a long-term, triple-net lease. Ed Wlodarczyk and James Halepis of DTZ represented the seller and procured the buyer in the transaction.