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BILLERICA, MASS. — Tokyo Electron U.S. Holdings, a supplier of semiconductor production equipment, has renewed and expanded its lease by 52,683 square feet at 900 Middlesex Turnpike, Building 6 in Billerica. The company now occupies 91,649 square feet at the property. Michael Dalton of Cassidy Turley represented the tenant in the transaction. The landlord, Gutierrez Co., was self-represented.